Download X-Ray Metrology in Semiconductor Manufacturing by D. Keith Bowen,Brian K. Tanner PDF

By D. Keith Bowen,Brian K. Tanner

The scales thinking about glossy semiconductor production and microelectronics proceed to plunge downward. potent and exact characterization of fabrics with thicknesses less than a couple of nanometers should be accomplished utilizing x-rays. whereas many books can be found at the concept in the back of x-ray metrology (XRM), X-Ray Metrology in Semiconductor production is the 1st ebook to target the sensible facets of the know-how and its program in machine fabrication and fixing new fabrics problems.

Following a normal review of the sector, the 1st portion of the booklet is geared up by way of program and descriptions the ideas which are most suitable to every. the subsequent part delves into the concepts and conception at the back of the functions, comparable to specular x-ray reflectivity, diffraction imaging, and illness mapping. ultimately, the 3rd part offers technological info of every strategy, answering questions ordinarily encountered in perform. The authors provide genuine examples from the semiconductor and magnetic recording industries in addition to greater than a hundred and fifty sincerely drawn figures to demonstrate the dialogue. additionally they summarize the foundations and key information regarding each one process with inset bins came upon during the text.

Written by way of global leaders within the box, X-Ray Metrology in Semiconductor production offers genuine recommendations with a spotlight on accuracy, repeatability, and throughput.

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