Download Silicon Devices and Process Integration: Deep Submicron and by Badih El-Kareh PDF
By Badih El-Kareh
Silicon units and technique Integration covers state of the art silicon units, their features, and their interactions with approach parameters. It serves as a complete advisor which addresses either the theoretical and functional features of contemporary silicon units and the connection among their electric houses and processing stipulations. The booklet is compiled from the author’s business and educational lecture notes and displays years of expertise within the improvement of silicon units.
Features include:
- A overview of silicon homes which supplies a starting place for realizing the gadget homes dialogue, together with mobility-enhancement by way of straining silicon;
- State-of-the-art applied sciences on high-K gate dielectrics, low-K dielectrics, Cu interconnects, and SiGe BiCMOS;
- CMOS-only functions, equivalent to subthreshold present and parasitic latch-up;
- Advanced allowing methods and approach integration.
This e-book is written for engineers and scientists in semiconductor study, improvement and production. the issues on the finish of every bankruptcy and the varied charts, figures and tables additionally make it acceptable to be used as a textual content in graduate and complex undergraduate classes in electric engineering and fabrics science.
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